The transportation of high-purity chemical reagents

In semiconductor manufacturing, even extremely small amounts of metallic ions, particle impurities, or organic contaminants can have catastrophic consequences. These impurities can alter the paths of electron transport within the chip, increase resistance, and lead to excessive heat generation and performance degradation. Impurities can also cause shorts and other issues, rendering the chip inoperable. According to relevant research, yield losses due to purity issues of chemical reagents in the chip manufacturing process can reach 20% - 30%, which is undoubtedly a significant challenge for the semiconductor industry, which pursues high precision and high output.

The key role of magnetic drive pumps in it

In the entire semiconductor manufacturing process, magnetic drive pumps ensure the continuity of chemical reagent transportation. Their continuous and stable operation ensures the timely supply of chemical reagents needed for different processes, avoiding production downtime due to reagent supply interruptions. Taking the film deposition process as an example, it is necessary to continuously supply specific gases and liquid chemical reagents to the reaction chamber. The stable operation of the chemical pump ensures the continuity of the deposition process, allowing uniform film growth and ensuring the electrical properties and reliability of the chip.

As a type of chemical pump that is highly favored in the semiconductor industry, the biggest highlight of the magnetic drive pump lies in its unique design without mechanical seals. It uses a magnetic coupling to achieve power transmission, and the pump shaft and motor shaft interact with each other through magnetic force, without the need for traditional mechanical sealing devices. This fully sealed design is like putting on a strong "protective armor" for chemical reagents, fundamentally eliminating the possibility of medium leakage. In the semiconductor manufacturing process, even extremely small leaks can cause serious pollution problems, and the emergence of magnetic pumps perfectly solves this hidden danger. In the process of transporting photoresist, the magnetic pump can ensure that the photoresist flows stably in a closed pipeline without any leakage, thus ensuring the high purity of the photoresist. In the transportation of high-purity electronic-grade hydrofluoric acid, the fully sealed characteristics of the magnetic pump effectively avoid the contact between hydrofluoric acid and the outside air, prevent the volatilization of hydrofluoric acid and the harm to the environment and personnel that may be caused by leaks, and at the same time ensure that the purity of hydrofluoric acid is not affected, providing a reliable guarantee for subsequent etching processes.